Bookcover of Finite Element Analysis of Electrostatic Coupled Systems
Booktitle:

Finite Element Analysis of Electrostatic Coupled Systems

Using Geometrically Nonlinear Mixed Assumed Stress Finite Elements

VDM Verlag Dr. Müller (2008-09-25 )

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ISBN-13:

978-3-639-08602-7

ISBN-10:
3639086023
EAN:
9783639086027
Book language:
English
Blurb/Shorttext:
Multi-physics coupled fields are often present in MEMS. This makes the modeling and analysis of such devices difficult and sometimes costly. The coupling between electrostatic and mechanical fields in MEMS is one of the most common and fundamental phenomena in MEMS; it is this configuration that is studied in this thesis. The following issues are addressed: 1. The finite element method (FEM) is therefore used to model electrostaticmechanical coupled MEMS. 2. In order to capture the configuration of the system accurately, with relatively little computational effort, a geometric non-linear mixed assumed stress element is developed and used in the FE analyses. 3. Selected algorithms for solving highly non-linear coupled systems are evaluated. 4.Finally, a practical engineering MEMS problem is studied.
Publishing house:
VDM Verlag Dr. Müller
Website:
http://www.vdm-verlag.de
By (author) :
Lai Zhi Cheng
Number of pages:
80
Published on:
2008-09-25
Stock:
Available
Category:
Technology
Price:
49.00 €
Keywords:
Finite element, mixed element, electrostatic coupled, MEMS

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